Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-05-17
2005-05-17
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C355S075000, C250S548000
Reexamination Certificate
active
06894763
ABSTRACT:
A mask stage RS1and a substrate stage WS1are synchronously moved, and a mask stage RS2and a substrate stage RS2are synchronously moved, in a state in which a mask on the mask stage RS1and a mask on the mask stage RS2are irradiated with illumination light beams from illumination optical systems IOP1, IOP2respectively. The reaction force on a base board due to the movement of the stages can be canceled to suppress the vibration of an exposure apparatus by moving the mask stage RS1and the mask stage RS2in mutually opposite directions. The throughput can be improved by performing alignment operation on substrate stages WS3, WS4concurrently with the exposure operation.
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Ichihara Yutaka
Miura Takaharu
Mizutani Hideo
Murakami Seiro
Tanimoto Akikazu
Kim Peter B.
Nikon Corporation
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