Exposure apparatus and method with multiple light receiving mean

Details Exposure apparatus and method with multiple light receiving mean Exposure apparatus and method with multiple light receiving mean

1996-09-30

1999-04-06

Moses, Richard

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 55, 355 67, G03B 2742, G03B 2752, G03B 2754, G03B 2772

Patent

active

058925732

ABSTRACT:
An exposure apparatus including an illumination optical system, a first light receiving system for receiving a portion of exposure light from the illumination optical system, a movable reticle stage having a transmitting portion for transmitting exposure light, and a second light receiving system for receiving the exposure light transmitted through the transmitting portion. Accordingly, the exposure apparatus is able to correct the sensitivity of the first light receiving system without unloading a reticle.

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