Exposure apparatus and method wherein the magnification of the p

Details Exposure apparatus and method wherein the magnification of the p Exposure apparatus and method wherein the magnification of the p

1997-09-19

2000-08-15

Moses, R. L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 55, 356399, 356400, 356401, G03B 2742, G01B 1100

Patent

active

061044717

ABSTRACT:
When alignment marks, which have been previously formed on a substrate corresponding to each of two orthogonal axial directions, are detected by a microscope, a main control unit detects positions and numbers of the respective marks, and calculates stretching degrees of the substrate in the two orthogonal axial directions respectively on the basis of information on the detected positions of specified marks and information on designed positions of the specified marks. The main control unit determines a mean value of the stretching degrees by weighting each of the calculated stretching degrees in the two orthogonal axial directions in accordance with the detected numbers of the marks corresponding to each of the two orthogonal axial directions so that the determined weighted mean value of the stretching degrees is set as a magnification correction value. A magnification controller corrects, through a magnification-adjusting mechanism, a magnification of a projection optical system on the basis of the set magnification correction value. When stretching of the substrate takes place, the pattern continuity and the overlay accuracy in an intended privileged direction can be improved.

REFERENCES:
patent: 5298761 (1994-03-01), Aoki et al.
patent: 5448333 (1995-09-01), Iwamoto et al.

Affiliated with

Also associated with

Rating

Exposure apparatus and method wherein the magnification of the p does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Exposure apparatus and method wherein the magnification of the p, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exposure apparatus and method wherein the magnification of the p will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2012733