Exposure apparatus and method wherein alignment is carried out b

Details Exposure apparatus and method wherein alignment is carried out b Exposure apparatus and method wherein alignment is carried out b

1996-07-22

1998-05-12

Moses, R. L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 55, 355 77, 356401, 2502011, G03B 2742, G03B 2752, G03B 2732, G02B 1100

Patent

active

057514046

ABSTRACT:
A scanning exposure apparatus includes a first movable stage being movable while carrying a first object thereon, a second movable stage being movable while carrying a second object thereon, a projection optical system for projecting a pattern, a control system serviceable to scan the first and second movable stages in a timed relation and relative to the projection optical system and to project a pattern of the first object onto the second object through the projection optical system, a first reference plate fixedly mounted on the first movable stage, a second reference plate fixedly mounted on the second movable stage, and a detecting system serviceable to scan at least one of the first and second movable stages to detect a relative positional relationship between alignment marks of the first and second reference plates to thereby determine a scan direction of one of the first and second movable stages.

REFERENCES:
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patent: 5309197 (1994-05-01), Mori et al.
patent: 5414514 (1995-05-01), Smith et al.
patent: 5498878 (1996-03-01), Hasegawa et al.
patent: 5499099 (1996-03-01), Sato et al.

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