Exposure apparatus and method thereof

Details Exposure apparatus and method thereof Exposure apparatus and method thereof

2008-07-08

2008-07-08

Berman, Jack I. (Department: 2881)

Radiant energy

Irradiation of objects or material

C250S492200, C250S494100, C250S50400H, C156S306900, C156S331100, C204S478000

Reexamination Certificate

active

11342977

ABSTRACT:
An exposure apparatus includes a loading device, a first energy-producing device, and a second energy-producing device. The loading device comprises a plurality of supporting elements, supporting a panel. The first and second energy producing devices are disposed above and below the loading device, respectively.

REFERENCES:
patent: 4254325 (1981-03-01), Snyder
patent: 5263888 (1993-11-01), Ishihara et al.
patent: 1570736 (2005-01-01), None
patent: 1570736 (2005-01-01), None

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