Exposure apparatus and method of producing device

Details Exposure apparatus and method of producing device Exposure apparatus and method of producing device

2007-05-01

2007-05-01

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S067000, C355S072000, C355S075000, C250S492100, C430S005000, C430S030000, C430S311000

Reexamination Certificate

active

10785252

ABSTRACT:
To solve the problem, when the inside of an exposure apparatus is placed under vacuum, of a gas being emitted from a resin tube provided in the exposure apparatus, and a component of the gas adhering to and being deposited on the surface of an optical element, so that the optical performances of the optical element and the exposure apparatus are deteriorated, the exposure apparatus is provided with means for controlling the surface temperature of the resin tube in the exposure apparatus up to a predetermined temperature.

REFERENCES:
patent: 5338939 (1994-08-01), Nishino et al.
patent: 6222614 (2001-04-01), Ohtomo
patent: 6226073 (2001-05-01), Emoto
patent: 2002/0000029 (2002-01-01), Emoto
patent: 2005/0134814 (2005-06-01), Bakker
patent: 2006/0001322 (2006-01-01), Binnard
patent: 2001-297967 (2001-10-01), None
patent: WO9634051 (1996-10-01), None

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