Exposure apparatus and method of exposure using the same

Details Exposure apparatus and method of exposure using the same Exposure apparatus and method of exposure using the same

1993-04-30

1995-02-28

Rosasco, Steve

Photocopying

Projection printing and copying cameras

Methods

430 5, 430 30, G03B 2732

Patent

active

053942191

ABSTRACT:
A first window portion is provided in a predetermined portion on a substrate where pellicle films of a photomask are not provided, and a second window portion is provided in a predetermined portion on substrate where pellicle films of the photomask are provided. By comparing amounts of exposure luminous flux transmitting first and second window portions it is possible to determine the life of pellicle films and the life of an exposure light source.

REFERENCES:
patent: 4637714 (1987-01-01), Flamholz

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