Exposure apparatus and method of conveying mask and work

Details Exposure apparatus and method of conveying mask and work Exposure apparatus and method of conveying mask and work

2005-04-12

2005-04-12

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S075000, C355S077000

Reexamination Certificate

active

06879378

ABSTRACT:
An exposure apparatus includes a first transferring passage and a second transferring passage arranged at two different levels between a load/unload position and an exposure position, a first table and a second table one positioned in the load/unload position while the other positioned in the exposure position, a hoist mechanism which elevates one of the first and second tables to the first transferring passages, and lowers the other of the second and first tables to the second transferring passage, and a conveyor mechanism which transfers the first and second tables respectively to the load/unload position and the exposure position. Each of the first and second tables has a stage plate on which a work is placed, and a light-transmissible plate to which a mask is previously mounted.

REFERENCES:
patent: 4541714 (1985-09-01), Miyamoto
patent: 4677303 (1987-06-01), Erdman
patent: 4996763 (1991-03-01), Sano et al.
patent: 5031334 (1991-07-01), Takamura
patent: 5222293 (1993-06-01), Ozimek et al.
patent: 5329126 (1994-07-01), Amemiya et al.
patent: 5390025 (1995-02-01), Morita et al.
patent: 5563682 (1996-10-01), Aikawa et al.
patent: A-8-43950 (1996-02-01), None

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