Exposure apparatus and method of controlling exposure apparatus

Details Exposure apparatus and method of controlling exposure apparatus Exposure apparatus and method of controlling exposure apparatus

2005-07-20

2008-07-01

Mathews, Alan A (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S053000, C355S077000, C250S548000, C430S030000

Reexamination Certificate

active

07394523

ABSTRACT:
An exposure apparatus generates an interlock signal to stop an exposure process when defocus is detected in real time. Leveling data for at least one wafer, and a predetermined threshold value are stored in a memory of the exposure apparatus. A value indicative of the defocus is calculated from the leveling data. An interlock signal is generated if the result of comparing the defocus value and the threshold value reveals that the focus of a lens of the exposure apparatus is outside an acceptable range.

REFERENCES:
patent: 5483056 (1996-01-01), Imai
patent: 5693439 (1997-12-01), Tanaka et al.
patent: 5856053 (1999-01-01), Watanabe
patent: 6608681 (2003-08-01), Tanaka et al.
patent: 6894782 (2005-05-01), Hoshino et al.
patent: 6975384 (2005-12-01), Ina
patent: 2004/0013957 (2004-01-01), Hoshino et al.

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