Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-06-13
2006-06-13
Evans, Geoffrey S. (Department: 1725)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000, C355S067000, C359S509000, C219S121840
Reexamination Certificate
active
07061576
ABSTRACT:
An exposure apparatus includes a light source, which emits an exposure beam, an optical system including a casing and an optical element, the casing having a closed space and the optical element being disposed in the casing, a first supplier, which supplies an inert gas into the closed space, a second supplier, which supplies one of oxygen and clean air into the closed space and a controller, which changes a wavelength of the exposure beam between exposure of a substrate and cleaning of the optical element.
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Hase Tomoharu
Yamane Yukio
Canon Kabushiki Kaisha
Evans Geoffrey S.
Fitzpatrick ,Cella, Harper & Scinto
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