Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-02-02
2008-10-14
Fuller, Rodney E (Department: 2862)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S077000
Reexamination Certificate
active
07436487
ABSTRACT:
An exposure apparatus performs an exposure of a substrate by filling at least a portion of the space between a projection optical system and the substrate with a liquid and projecting an image of a pattern onto the substrate via the projection optical system and the liquid. The apparatus includes a bubble detector that detects air bubble or bubbles in the liquid between the projection optical system and the substrate. Consequently, the exposure apparatus is capable of suppressing deterioration of a pattern image caused by bubbles in the liquid when an exposure is carried out while filling the space between the projection optical system and the substrate with the liquid.
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Magome Nobutaka
Mizutani Hideo
Fuller Rodney E
Nikon Corporation
Oliff & Berridg,e PLC
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