Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-08-15
2006-08-15
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S077000
Reexamination Certificate
active
07092071
ABSTRACT:
An exposure apparatus includes a projection optical system for exposing and transferring a pattern on a mask onto an object, an illumination optical system for forming a secondary light source surface approximately conjugate with a pupil in the projection optical system, and for illuminating the mask, and a mechanism for making non-uniform at least one of a transmittance distribution from the secondary light source to the object and a light intensity distribution on the secondary light source surface.
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Canon Kabushiki Kaisha
Mathews Alan
Morgan & Finnegan L.L.P.
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