Exposure apparatus and method

Details Exposure apparatus and method Exposure apparatus and method

1986-01-29

1987-11-17

Fields, Carolyn E.

Radiant energy

Irradiation of objects or material

2504922, G21G 500

Patent

active

047076097

ABSTRACT:
An exposure apparatus for exposing a first object to a radiation energy passed through a second object, having a pattern, thereby to transfer the pattern of the second object onto the first object, the exposure apparatus including a radiation energy source, at least one spare radiation energy source and an arrangement for substituting the first-mentioned radiation energy source by the second-mentioned, spare, radiation energy source when the service life of the first-mentioned radiation energy source becomes over or nearly over, wherein the spare radiation energy source is energized or actuated when the intensity of irradiation of the first-mentioned radiation energy source is decreased to a predetermined value and, at the same time or after elapse of a predetermined time, the first-mentioned radiation energy source is sustituted by the spare radiation energy source.

REFERENCES:
patent: 2590513 (1952-03-01), Crossley et al.
patent: 3577173 (1971-05-01), Bloomgren
patent: 4061911 (1977-12-01), Krasin
patent: 4398094 (1983-08-01), Hiramoto
patent: 4399358 (1983-08-01), Burkhardt et al.
patent: 4415951 (1986-11-01), Necane et al.

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