Exposure apparatus and method

Details Exposure apparatus and method Exposure apparatus and method

2008-06-13

2009-12-08

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000

Reexamination Certificate

active

07630055

ABSTRACT:
An apparatus projects a pattern formed on an original plate onto a substrate through a projection optical system and liquid in a state where a gap between the substrate and a face of the projection optical system is filled with liquid. The apparatus includes a movable substrate stage to hold the substrate and including at least a mark unit or a measurement unit having a light-receiving unit, a determination device to determine whether the liquid is attached to the mark unit or the measurement unit, and a liquid supply device to attach liquid to at least the mark unit or the measurement unit before the attached liquid is air-dried if liquid is determined to be attached to the mark unit or the measurement unit.

REFERENCES:
patent: 6496257 (2002-12-01), Taniguchi et al.
patent: 7242455 (2007-07-01), Nei et al.
patent: 2007/0076197 (2007-04-01), Koga
patent: 2007/0258072 (2007-11-01), Nagasaka et al.
patent: 2005-019864 (2005-01-01), None
patent: 2005-038874 (2005-02-01), None
patent: 2005-116570 (2005-04-01), None
patent: 2005-191557 (2005-07-01), None
patent: WO 2005/022616 (2005-03-01), None

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