Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-04-28
2009-11-10
Lee, Diane I (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C356S128000, C438S007000
Reexamination Certificate
active
07616290
ABSTRACT:
An exposure apparatus including a projection optical system for projecting a pattern of a reticle onto a plate to be exposed, via a liquid that is filled in a space between the projection optical system and the plate, a supply pipe for supplying the liquid to the space between a final surface in the projection optical system and the plate, a recovery pipe for recovering the liquid from the space between the final surface in the projection optical system and the plate, and a measuring apparatus for measuring a refractive index of the liquid. The measuring apparatus includes (i) a cell for accommodating the liquid and transmitting light, wherein the cell is connected to one of the supply pipe and the recovery pipe, and (ii) a detector for detecting an incident position of the light refracted by the liquid in the cell.
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Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Lee Diane I
Whitesell-Gordon Steven H
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