Exposure apparatus and method

Details Exposure apparatus and method Exposure apparatus and method

2007-02-20

2007-02-20

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S077000, C378S034000

Reexamination Certificate

active

11088160

ABSTRACT:
An exposure apparatus includes a projection optical system for projecting an image of a pattern of a reticle onto an object, via a fluid that is filled in a space between said projection optical system and the object, a vibrator part for vibrating at least one of the fluid, the object, and the projection optical system, and a controller for controlling the vibrator part so that the vibration of at least one of the fluid, the object, and the projection optical system becomes a tolerance during a processing of the object.

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Korean Patent Office Communication dated Jun. 22, 2006, w/English Translation of Examiner's Comments in Korean Office Action.
Taiwan Patent Office Communication dated Sep. 21, 2006 with English translation of Examiner's Comments in Taiwanese Office Action.

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