Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2007-04-24
2007-04-24
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S067000
Reexamination Certificate
active
11459674
ABSTRACT:
An exposure apparatus for exposing a pattern of a reticle onto a plate while synchronously scanning the reticle and the plate, said exposure apparatus includes a projection optical system for projecting the pattern of the reticle onto the plate, a measuring part for measuring a position of a surface of a target to be measured in an optical axis direction of the projection optical system, and a controller for controlling the position of the surface of the target in the optical axis direction based on a measurement result by the measuring part, wherein said measuring part measures a position of the same measurement point on the surface of the target plural times, wherein said controller uses, as a measurement value of the same measurement point, an average value of plural measurement results obtained at the same measurement point, and wherein said target is the reticle or the plate.
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Morgan & Finnegan , LLP
Nguyen Henry Hung
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