Exposure apparatus and method

Details Exposure apparatus and method Exposure apparatus and method

1998-01-06

2000-01-18

Moses, Richard

Photocopying

Projection printing and copying cameras

Step and repeat

355 71, G03B 2742

Patent

active

060161876

ABSTRACT:
An exposure apparatus and method wherein a mask is illuminated with light and light one of transmitted through and reflected from the illuminated mask is imaged onto a substrate. At least during imaging transmission of light one of transmitted and reflected from the illuminated mask is partially inhibited. More particularly, a spatial filter is utilized for inhibiting at least a portion of O-order diffraction light.

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patent: 5305054 (1994-04-01), Suzuki et al.
patent: 5767949 (1998-06-01), Noguchi et al.

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