Exposure apparatus and method

Details Exposure apparatus and method Exposure apparatus and method

1994-04-29

1996-06-11

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 71, 355 77, G03B 2742, G03B 2772, G03B 2732

Patent

active

055260942

ABSTRACT:
An exposure apparatus and method wherein a mask is illuminated with light and light one of transmitted through and reflected from the illuminated mask is imaged onto a substrate. At least during imaging, transmission of light one of transmitted and reflected from the illuminated mask is partially inhibited. More particularly, a spatial filter is utilized for inhibiting at least a portion of O-order diffraction light.

REFERENCES:
patent: 3947112 (1976-03-01), Hahn et al.
patent: 4666294 (1987-05-01), Imamura et al.
patent: 4744660 (1988-05-01), Noguchi et al.
patent: 4788600 (1988-11-01), Marsiglio et al.
patent: 4947413 (1990-08-01), Jewell et al.
patent: 5048967 (1991-09-01), Suzuki et al.
patent: 5062705 (1991-11-01), Sato et al.
patent: 5121160 (1992-06-01), Sano et al.

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