Exposure apparatus and image plane detecting method

Details Exposure apparatus and image plane detecting method Exposure apparatus and image plane detecting method

2007-03-09

2010-02-02

Glick, Edward J (Department: 2882)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S053000, C355S077000, C356S401000, C356S620000

Reexamination Certificate

active

07656503

ABSTRACT:
An exposure apparatus including an illumination optical system to illuminate an original with exposure light of plural wavelengths, a projection optical system to project an image of a pattern of the original onto a substrate, an original-side reference pattern provided at an original side of the projection optical system, a substrate-side reference pattern provided at a substrate side of the projection optical system, and an image plane detecting system configured so that the original-side reference pattern is illuminated with the exposure light or light equivalent to the exposure light with respect to a wavelength component rate.

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