Exposure apparatus and exposure method for performing...

Details Exposure apparatus and exposure method for performing... Exposure apparatus and exposure method for performing...

2007-08-28

2007-08-28

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S052000

Reexamination Certificate

active

11259810

ABSTRACT:
In an exposure apparatus, in which exposure data necessary for direct exposure is sequentially supplied to an exposure engine having a plurality of exposure devices and, based on the supplied exposure data, the exposure engine forms an exposure pattern on an exposure target substrate which moves relative to the exposure engine, lights respectively produced from the exposure device groups based on the identical exposure data supplied to each of the plurality of exposure device groups, are projected via optics so as to be superimposed one on top of another on the same area on the exposure target substrate.

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patent: 10-112579 (1998-04-01), None
patent: 2004-1244 (2004-01-01), None

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