Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1994-12-06
1997-06-17
Pendegrass, Joan H.
Photocopying
Projection printing and copying cameras
Step and repeat
355 55, 250548, H01L 21027
Patent
active
056402279
ABSTRACT:
An exposure apparatus and an exposure method which minimize defocusing of the transferred pattern even with a large-sized mask. When the exposure apparatus is used which transfers the pattern formed on a first substrate through a substantially real-size projection optical system onto a second substrate, the positions of the mask and the substrate are detected, and based on the information on the positions the distance between the mask and the substrate is controlled to be substantially constant. According to the present invention, defocusing of the transferred pattern may be substantially avoided by detecting positions of the mask and the plate by making use of, e.g., an obliquely incident light focus detection optical system, and controlling the distance therebetween to be held constant or at a predetermined distance.
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Kato Kinya
Kato Masaki
Saiki Kazuaki
Seki Masami
Nikon Corporation
Pendegrass Joan H.
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