Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-08-09
2005-08-09
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C355S069000, C355S071000
Reexamination Certificate
active
06927836
ABSTRACT:
An exposure apparatus which expose a photosensitive layer on an object with light via a mask having a pattern to be transferred onto the photosensitive layer, includes an illumination optical system having plural optical elements provided along an optical axis substantially perpendicular to a plane on which the pattern is placed, and which include an optical integrator from which the mask is illuminated with the light through a part of the plural optical elements. The apparatus also includes a filter device having a rotatable filter element provided between the optical integrator and the plane, and having a transmittance distribution in a predetermined area. Light from the optical integrator passes through a portion in the predetermined area. Light from the filter element has a variable intensity distribution different from that of the light incident on the filter element from the optical integrator, and made variable by rotating the filter element.
REFERENCES:
patent: 4598197 (1986-07-01), Morita et al.
patent: 5305054 (1994-04-01), Suzuki et al.
patent: 5486896 (1996-01-01), Hazama et al.
patent: 5499100 (1996-03-01), Tanaka
patent: 5581075 (1996-12-01), Naraki et al.
patent: 5615047 (1997-03-01), Komatsuda et al.
patent: 5684566 (1997-11-01), Stanton
patent: 5719704 (1998-02-01), Shiraishi et al.
patent: 5841520 (1998-11-01), Taniguchi
patent: 5867319 (1999-02-01), Sugiyama et al.
patent: 6051842 (2000-04-01), Yamamoto
patent: 6127095 (2000-10-01), Kudo
patent: 6211944 (2001-04-01), Shiraishi
patent: 6259512 (2001-07-01), Mizouchi
patent: 6281967 (2001-08-01), Kudo
patent: 6333777 (2001-12-01), Sato
patent: 6404499 (2002-06-01), Stoeldraijer et al.
patent: 6535274 (2003-03-01), Antoni
patent: 6583855 (2003-06-01), Krikke et al.
patent: 6607863 (2003-08-01), Irie
patent: 6704090 (2004-03-01), Nishi
patent: 2001/0010579 (2001-08-01), Nishi
patent: 2004/0032576 (2004-02-01), Kondo
patent: 0 869 396 (1998-10-01), None
patent: 0 952 491 (1999-10-01), None
patent: A-59-83165 (1984-05-01), None
patent: A-61-190935 (1986-08-01), None
patent: A-6-124875 (1994-05-01), None
patent: B2-7-85140 (1995-09-01), None
patent: A-10-27752 (1998-01-01), None
patent: A-10-199800 (1998-07-01), None
patent: A-11-317349 (1999-11-01), None
Nikon Corporation
Oliff & Berridg,e PLC
Rutledge D.
LandOfFree
Exposure apparatus and exposure method capable of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Exposure apparatus and exposure method capable of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exposure apparatus and exposure method capable of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3484662