Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2005-01-11
2005-01-11
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S077000
Reexamination Certificate
active
06842221
ABSTRACT:
After a mask is carried into a reserve room for temporarily storing before carrying into a mask room filled with specific gas that has an impurity concentration lower than a first concentration (e.g. 1 ppb) and that has a characteristic of absorbing little exposure light, gas-replacement mechanisms replace gas in the reserve room with specific gas having an oxygen concentration not lower than the first concentration. Therefore, when subsequently carrying the mask into the mask room, impurities from the outside (including absorbent gas) can be substantially prevented from getting into the optical path inside the mask room. When replacing a wafer, gas in a reserve room is also replaced in the same way as the above.
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Mathews Alan
Nikon Corporation
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
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