Photocopying – Projection printing and copying cameras – Multicolor picture
Reexamination Certificate
2008-01-07
2009-08-25
Wells, Nikita (Department: 2881)
Photocopying
Projection printing and copying cameras
Multicolor picture
C355S067000, C250S492220, C250S492200, C250S50400H, C250S365000, C313S231610, C315S111210
Reexamination Certificate
active
07580110
ABSTRACT:
An exposure apparatus and exposure method that produces plasma from a target material, generates pulsed light, and carries out exposure with the pulsed light.In particular, a light emitting source generates pulsed light by producing plasma from an intermittently supplied target material. A reticle stage holds a reticle that is irradiated by the pulsed light. A photosensitive substrate stage holds a photosensitive substrate irradiated by the pulsed light patterned by the reticle. A control means controls the photosensitive substrate stage so that, before exposing the photosensitive substrate begins, the timing between an exposure starting point or an exposure ending point and the light emission timing are matched based on the drive timing of the photosensitive substrate stage and the light emission timing of the pulsed light.
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Kondo Hiroyuki
Miyachi Takashi
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Nikon Corporation
Wells Nikita
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