Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2006-05-30
2006-05-30
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S030000, C355S053000
Reexamination Certificate
active
07053989
ABSTRACT:
An exposure apparatus comprises an irradiation optical system for irradiating a pattern formed on an original plate with light emitted from a light source, a projection optical system for projecting a light image from the pattern onto a substrate, a drivable substrate stage for mounting the substrate, and a light absorber disposed on the substrate stage, wherein the light absorber is disposed on the substrate stage by a thermal insulating layer and/or a cooling unit. Thus, an exposure apparatus can be provided which performs exposure of a wafer without being influenced by adverse effects such as thermal deformation of units such as a wafer stage or the like due to exposure process other than exposure of the wafer, such as pre-exposure.
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Canon USA Inc IP Division
Nguyen Henry Hung
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