Exposure apparatus and exposure method

Details Exposure apparatus and exposure method Exposure apparatus and exposure method

2006-04-25

2006-04-25

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S071000

Reexamination Certificate

active

07034922

ABSTRACT:
Fine patterns with the targeted line widths are formed with a high accuracy by correcting any change in image of a light-attenuating part of a density filter on a substrate arising along with a change in illumination conditions on a reticle by adjusting an amount of defocus of the density filter with respect to a reticle conjugate plane.

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