Exposure apparatus and exposure method

Details Exposure apparatus and exposure method Exposure apparatus and exposure method

2005-05-03

2005-05-03

Font, Frank G. (Department: 1752)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S035000, C355S053000, C355S068000, C250S206000, C250S492200, C250S492220

Reexamination Certificate

active

06888618

ABSTRACT:
A scan type exposure apparatus wherein a pattern of an original is lithographically transferred to a substrate sequentially while the original and the substrate are scanningly moved relative to exposure light, the apparatus including a photodetector disposed at a position optically conjugate with the original, and a storing device for storing correction information with respect to an output of the photodetector, in relation to different positions of the original to be illuminated with the exposure light, such that, in the lithographic pattern transfer, the output of the photodetector can be corrected by use of the correction information.

REFERENCES:
patent: 5004348 (1991-04-01), Magome
patent: 5581324 (1996-12-01), Miyai et al.
patent: 5585925 (1996-12-01), Sato et al.
patent: 5591958 (1997-01-01), Nishi et al.
patent: 5608492 (1997-03-01), Sato
patent: 5753926 (1998-05-01), Sato

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