Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1997-07-14
1998-08-18
Braun, Fred L.
Photocopying
Projection printing and copying cameras
Step and repeat
355 30, G03B 2742, G03B 2752
Patent
active
057964696
ABSTRACT:
An exposure apparatus in which a portion of a pattern of a reticle is projected onto a wafer and in which the reticle and the wafer are scanned synchronously such that the pattern of the reticle is transferred to the wafer. The apparatus includes a reticle stage and a wafer stage for scanningly moving the reticle and the wafer, respectively, a measuring system for measuring a deviation of the reticle stage relative to the wafer stage in a predetermined direction other than the direction of scanning movement, and an adjusting device for adjusting the wafer stage on the basis of the measurement by the measuring system. In one aspect, the measuring system includes a laser interferometer. In another aspect, a frame member is provided for supporting the stages, and a flow passageway is provided in the frame member for flowing therethrough a temperature adjusting medium. In yet another aspect, the present invention is directed to an exposure method for the manufacture of microdevices.
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Braun Fred L.
Canon Kabushiki Kaisha
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