Exposure apparatus and device manufacturing method using the sam

Details Exposure apparatus and device manufacturing method using the sam Exposure apparatus and device manufacturing method using the sam

1997-10-07

2000-12-19

Adams, Russell

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, 355 71, G03B 2742, G03B 2754, G03B 2772

Patent

active

061633658

ABSTRACT:
An exposure apparatus for exposing, in an actual exposure process, an object with light through an optical system. The apparatus includes a transmission factor maintaining device for irradiating the optical system with light before the actual exposure process, so that a transmission factor of a portion of or the whole of the optical system is substantially unchanged as a result of the actual exposure process.

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