Exposure apparatus and device manufacturing method including...

Details Exposure apparatus and device manufacturing method including... Exposure apparatus and device manufacturing method including...

2005-02-08

2005-02-08

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C359S620000

Reexamination Certificate

active

06853439

ABSTRACT:
An exposure apparatus includes an illumination optical system for illuminating an original with ultraviolet light, a projection optical system for projecting a pattern of the original onto a substrate to be exposed and a gas purging means for replacing an inside space, which contains optical components of at least one of the illumination optical system and the projection optical system, with a gas having substantially no water content.

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