Exposure apparatus and device manufacturing method

Details Exposure apparatus and device manufacturing method Exposure apparatus and device manufacturing method

2006-01-19

2011-10-11

Meier, Stephen (Department: 2853)

Incremental printing of symbolic information

Electric marking apparatus or processes

Electrostatic

C347S134000

Reexamination Certificate

active

08035668

ABSTRACT:
An exposure apparatus which forms a pattern on an object. The apparatus includes an exposure head structure in which a plurality of elemental exposure units are arrayed, each elemental exposure unit including (i) at least one light source for emitting exposure light and (ii) an optical element which forms an image of the at least one light source on the object, for exposing the object. Positions of the images of the at least one light source in a direction perpendicular to a surface of the object include plural positions different from each other. A sensor detects a position of the surface of the object and produces a detection result. A controller receives the detection result and controls the exposure head structure such that a pattern is formed on the object by the exposure is selected to expose the object based on the detection result by the sensor.

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Japanese Office Action dated Jun. 18, 2010, which issued in counterpart Japanese patent application No. 2005-013033.

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