Exposure apparatus, and device manufacturing method

Details Exposure apparatus, and device manufacturing method Exposure apparatus, and device manufacturing method

2007-06-07

2011-12-13

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000

Reexamination Certificate

active

08077290

ABSTRACT:
An apparatus includes a stage configured to hold a substrate and to be moved, a measurement station including a measurement device configured to measure, with respect to each of a plurality of measurement points in a surface of the substrate held by the stage, a position of the surface, and an exposure station configured to expose the substrate to radiation while the stage is scanned, the stage being moved to the exposure station from the measurement station after the position of the surface is measured, and being scanned in the exposure station in accordance with the measured position of the surface, wherein the apparatus is configured to calculate a status concerning an error of a measurement value of the measurement device with respect to each of the plurality of measurement points based on outputs of the measurement device obtained with respect to the plurality of measurement points, and to set arrangement of the plurality of measurement points based on the calculated statuses.

REFERENCES:
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patent: 11-195579 (1999-07-01), None
patent: 2000-323404 (2000-11-01), None
patent: 2003-007607 (2003-01-01), None

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