Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-03-15
2011-03-15
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000
Reexamination Certificate
active
07907252
ABSTRACT:
A hydrostatic pad (32) and a hydrostatic pad (34) hold a wafer (W) and a table (TB) on which the wafer is mounted. The hydrostatic pad (32) maintains the distance between the bearing surface and the wafer (W) in the direction of the optical axis of a projection optical system (PL) at a predetermined value. Further, since the hydrostatic pads, unlike static gas bearings, utilize the static pressure of incompressible fluid (liquid) between the bearing surface and a support object (substrate), the rigidity of the bearing is high and the distance between the bearing surface and the substrate is maintained stable and constant. In addition, liquid (e.g., pure water) is higher in viscosity than gas (e.g., air), and is superior in vibration damping compared to gas. Accordingly, pattern transfer on a wafer (substrate) substantially free from defocus can be achieved, without necessarily having to arrange a focal position detection system.
REFERENCES:
patent: 3648587 (1972-03-01), Stevens
patent: 4026653 (1977-05-01), Appelbaum et al.
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4465368 (1984-08-01), Matsuura et al.
patent: 4480910 (1984-11-01), Takanashi et al.
patent: 4509852 (1985-04-01), Tabarelli et al.
patent: 4650983 (1987-03-01), Suwa
patent: 4780617 (1988-10-01), Umatate et al.
patent: RE32795 (1988-12-01), Matsuura et al.
patent: 5121256 (1992-06-01), Corle et al.
patent: 5243195 (1993-09-01), Nishi
patent: 5448332 (1995-09-01), Sakakibara et al.
patent: 5528100 (1996-06-01), Igeta et al.
patent: 5528118 (1996-06-01), Lee
patent: 5534970 (1996-07-01), Nakashima et al.
patent: 5610683 (1997-03-01), Takahashi
patent: 5611452 (1997-03-01), Bonora et al.
patent: 5623853 (1997-04-01), Novak et al.
patent: 5636066 (1997-06-01), Takahashi
patent: 5646413 (1997-07-01), Nishi
patent: 5668672 (1997-09-01), Oomura
patent: 5689377 (1997-11-01), Takahashi
patent: 5691802 (1997-11-01), Takahashi
patent: 5693439 (1997-12-01), Tanaka et al.
patent: 5715039 (1998-02-01), Fukuda et al.
patent: 5744924 (1998-04-01), Lee
patent: 5805334 (1998-09-01), Takahashi
patent: 5815246 (1998-09-01), Sperling et al.
patent: 5825043 (1998-10-01), Suwa
patent: 5835275 (1998-11-01), Takahashi et al.
patent: 5844247 (1998-12-01), Nishi
patent: 5861997 (1999-01-01), Takahashi
patent: 5874820 (1999-02-01), Lee
patent: 5900354 (1999-05-01), Batchelder
patent: 5942871 (1999-08-01), Lee
patent: 5964441 (1999-10-01), Gauger et al.
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 5982128 (1999-11-01), Lee
patent: 5999333 (1999-12-01), Takahashi
patent: 6008500 (1999-12-01), Lee
patent: 6020710 (2000-02-01), Lee
patent: 6049186 (2000-04-01), Lee
patent: 6051843 (2000-04-01), Nishi
patent: RE36730 (2000-06-01), Nishi
patent: 6087797 (2000-07-01), Lee
patent: 6137561 (2000-10-01), Imai
patent: 6150787 (2000-11-01), Lee
patent: 6151105 (2000-11-01), Lee
patent: 6175404 (2001-01-01), Lee
patent: 6188195 (2001-02-01), Lee
patent: 6208407 (2001-03-01), Loopstra
patent: 6246202 (2001-06-01), Lee
patent: 6262796 (2001-07-01), Loopstra et al.
patent: RE37309 (2001-08-01), Nakashima et al.
patent: 6271640 (2001-08-01), Lee
patent: 6279881 (2001-08-01), Nishi
patent: 6281654 (2001-08-01), Lee
patent: 6316901 (2001-11-01), Lee
patent: 6331885 (2001-12-01), Nishi
patent: 6341007 (2002-01-01), Nishi
patent: 6400441 (2002-06-01), Nishi et al.
patent: 6417914 (2002-07-01), Li
patent: 6426790 (2002-07-01), Hayashi
patent: 6433872 (2002-08-01), Nishi et al.
patent: 6445441 (2002-09-01), Mouri
patent: 6449030 (2002-09-01), Kwan
patent: 6496257 (2002-12-01), Taniguchi et al.
patent: 6498352 (2002-12-01), Nishi
patent: 6549269 (2003-04-01), Nishi et al.
patent: 6590634 (2003-07-01), Nishi et al.
patent: 6608681 (2003-08-01), Tanaka et al.
patent: 6665054 (2003-12-01), Inoue
patent: 6683433 (2004-01-01), Lee
patent: RE38421 (2004-02-01), Takahashi
patent: RE38438 (2004-02-01), Takahashi
patent: 6747732 (2004-06-01), Lee
patent: 6771350 (2004-08-01), Nishinaga
patent: 6788385 (2004-09-01), Tanaka et al.
patent: 6788477 (2004-09-01), Lin
patent: 6798491 (2004-09-01), Nishi et al.
patent: 6841965 (2005-01-01), Lee
patent: 6842221 (2005-01-01), Shiraishi
patent: 6853443 (2005-02-01), Nishi
patent: 6867844 (2005-03-01), Vogel et al.
patent: 6878916 (2005-04-01), Schuster
patent: 6891596 (2005-05-01), Rostalski et al.
patent: 6891683 (2005-05-01), Schuster
patent: 6897963 (2005-05-01), Taniguchi et al.
patent: 6906782 (2005-06-01), Nishi
patent: 6927836 (2005-08-01), Nishinaga
patent: 6927840 (2005-08-01), Lee
patent: 6952253 (2005-10-01), Lof et al.
patent: 6954256 (2005-10-01), Flagello et al.
patent: 6989647 (2006-01-01), Lee
patent: RE39024 (2006-03-01), Takahashi
patent: 7009682 (2006-03-01), Bleeker
patent: 7038760 (2006-05-01), Mulkens et al.
patent: 7057702 (2006-06-01), Lof et al.
patent: 7075616 (2006-07-01), Derksen et al.
patent: 7081943 (2006-07-01), Lof et al.
patent: 7092069 (2006-08-01), Schuster
patent: 7098991 (2006-08-01), Nagasaka et al.
patent: RE39296 (2006-09-01), Takahashi
patent: 7110081 (2006-09-01), Hoogendam et al.
patent: 7119874 (2006-10-01), Cox et al.
patent: 7119876 (2006-10-01), Van Der Toorn et al.
patent: 7119881 (2006-10-01), Bleeker
patent: 7154676 (2006-12-01), Schuster
patent: 7161659 (2007-01-01), Van Den Brink et al.
patent: 7177008 (2007-02-01), Nishi et al.
patent: 7190527 (2007-03-01), Rostalski et al.
patent: 7193232 (2007-03-01), Lof et al.
patent: 7199858 (2007-04-01), Lof et al.
patent: 7203008 (2007-04-01), Schuster
patent: 7213963 (2007-05-01), Lof et al.
patent: 7224436 (2007-05-01), Derksen et al.
patent: 7256869 (2007-08-01), Nishi
patent: 7312847 (2007-12-01), Rostalski et al.
patent: 7321419 (2008-01-01), Ebihara
patent: RE40043 (2008-02-01), Kwan et al.
patent: 7327435 (2008-02-01), Binnard
patent: 7339743 (2008-03-01), Schuster
patent: 7352434 (2008-04-01), Streefkerk et al.
patent: 7365513 (2008-04-01), Lee
patent: 7372538 (2008-05-01), Binnard
patent: 7372541 (2008-05-01), Lof et al.
patent: 7379158 (2008-05-01), Mizutani et al.
patent: 7382540 (2008-06-01), Rostalski et al.
patent: 7388648 (2008-06-01), Lof et al.
patent: 7394521 (2008-07-01), Van Santen et al.
patent: 7399978 (2008-07-01), Van Santen et al.
patent: 7436486 (2008-10-01), Hirukawa
patent: 7436487 (2008-10-01), Mizutani et al.
patent: 7442908 (2008-10-01), Schuster
patent: 7446851 (2008-11-01), Hirukawa
patent: 7456929 (2008-11-01), Shibuta
patent: 7460207 (2008-12-01), Mizutani et al.
patent: 7482611 (2009-01-01), Lof et al.
patent: 7486385 (2009-02-01), Ebihara
patent: 7495840 (2009-02-01), Schuster
patent: 7505111 (2009-03-01), Hirukawa et al.
patent: 7514699 (2009-04-01), Neijzen et al.
patent: 7528931 (2009-05-01), Modderman
patent: 7545479 (2009-06-01), Binnard
patent: 7589821 (2009-09-01), Hirukawa
patent: 7589822 (2009-09-01), Shibazaki
patent: 7593092 (2009-09-01), Lof et al.
patent: 7593093 (2009-09-01), Lof et al.
patent: 7639343 (2009-12-01), Hirukawa
patent: 2001/0019250 (2001-09-01), Lee
patent: 2001/0030522 (2001-10-01), Lee
patent: 2002/0017889 (2002-02-01), Lee
patent: 2002/0018192 (2002-02-01), Nishi
patent: 2002/0020821 (2002-02-01), Van Santen et al.
patent: 2002/0041377 (2002-04-01), Hagiwara et al.
patent: 2002/0061469 (2002-05-01), Tanaka
patent: 2002/0163629 (2002-11-01), Switkes et al.
patent: 2002/0176082 (2002-11-01), Sakakibara et al.
patent: 2002/0196421 (2002-12-01), Tanaka et al.
patent: 2003/0025890 (2003-02-01), Nishinaga
patent: 2003/0030916 (2003-02-01), Suenaga
patent: 2003/0075871 (2003-04-01), Shinozaki
patent: 2003/0117596 (2003-06-01), Nishi
patent: 2003/0128348 (2003-07-01), Nishi
patent: 2003/0174408 (2003-09-01), Rostalski et al.
patent: 2004/0000627 (2004-01-01), Schuster
patent: 2004/0004757 (2004-01-01), Schuster
patent: 2004/0032575 (2004-02-01), Nishi et al.
patent: 2004/0075895 (2004-04-01), Lin
patent: 2004/0095085 (2004-05-01), Lee
patent: 2004/0109237 (2004-06-01), Epple et al.
patent: 2004/0114117 (2004-06-01), Bleeker
patent: 2004/0118184 (2004-06-01), Violette
patent: 2004/0119954 (2004-06-01), Kawashima et al.
patent: 2004/0120051 (2004-06-01), Schuste
Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
LandOfFree
Exposure apparatus, and device manufacturing method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Exposure apparatus, and device manufacturing method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exposure apparatus, and device manufacturing method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2641466