Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-01-19
2009-12-29
Mathews, Alan A (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000, C355S072000, C355S077000
Reexamination Certificate
active
07639343
ABSTRACT:
An exposure apparatus illuminates a pattern with an energy beam and transfers the pattern onto a substrate via a projection optical system. The exposure apparatus includes a substrate stage on which the substrate is mounted and that moves within a two-dimensional plane holding the substrate. In addition, a supply mechanism supplies liquid to locally fill a space between the projection optical system and the substrate on the substrate stage with the liquid, and a recovery mechanism recovers the liquid. A plate is provided in at least a part of the periphery of a mounted area of the substrate on the substrate stage. The plate has a surface arranged at substantially the same height as a surface of the substrate mounted on the substrate stage.
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Mathews Alan A
Nikon Corporation
Oliff & Berridg,e PLC
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