Exposure apparatus, and device manufacturing method

Details Exposure apparatus, and device manufacturing method Exposure apparatus, and device manufacturing method

2007-06-13

2008-12-09

Mathews, Alan A (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

07463335

ABSTRACT:
An exposure apparatus for illuminating an original through an illumination system and for transferring a pattern of the original onto a substrate. The apparatus includes a movable element having a blade, the blade being provided in the illumination system and blocking at least a portion of illumination light, a stator configured to relatively move the movable element, and a resilient supporting member configured to resiliently support the stator without contacting the stator.

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patent: 2005/0185166 (2005-08-01), Miyajima et al.
patent: 10-97989 (1998-04-01), None

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