Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2008-09-09
2008-09-09
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S052000
Reexamination Certificate
active
11692471
ABSTRACT:
An exposure apparatus for exposing a substrate. A stage holds and moves the substrate, a measuring device measures a position of a surface of the substrate, and a controller defines an arrangement of measurement points with respect to each of a plurality of shot regions arranged along a straight line, and causes the measuring device to sequentially measure positions of the surface with respect to the defined measurement points in the plurality of shot regions, while the stage moves the substrate along the straight line. A timing at which the measuring device measures a position of the surface is controlled so that a first time interval and a second time interval are different from each other.
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