Exposure apparatus, and device manufacturing method

Details Exposure apparatus, and device manufacturing method Exposure apparatus, and device manufacturing method

2007-08-07

2007-08-07

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S071000

Reexamination Certificate

active

11251837

ABSTRACT:
An exposure apparatus for projecting, by exposure, a pattern of an original onto a substrate. The apparatus includes a light blocking device for blocking at least a portion of exposure light. The light blocking device includes two plate-like members which are disposed in a vertical direction with a clearance kept therebetween, and two plate-like members which are disposed in a horizontal direction with a clearance kept therebetween. The apparatus further includes a driving member for moving the light blocking device, wherein the driving member includes the stator, and a reaction force absorbing device for absorbing a drive reaction force of the driving member. The reaction force absorbing device absorbs the reaction force by moving the stator of the driving member.

REFERENCES:
patent: 6040893 (2000-03-01), Ebinuma
patent: 6262794 (2001-07-01), Miyajima
patent: 6408045 (2002-06-01), Matsui et al.
patent: 6538720 (2003-03-01), Galburt et al.
patent: 6784978 (2004-08-01), Galburt
patent: 2005/0093666 (2005-05-01), Miyajima et al.
patent: 2005/0185166 (2005-08-01), Miyajima et al.
patent: 10-97989 (1998-04-01), None

Affiliated with

Also associated with

Rating

Exposure apparatus, and device manufacturing method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Exposure apparatus, and device manufacturing method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exposure apparatus, and device manufacturing method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3896143