Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2007-12-11
2007-12-11
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S072000
Reexamination Certificate
active
11059331
ABSTRACT:
An exposure apparatus including a projecting optical system for projecting a pattern of the original onto a substrate, and an original stage being movable while carrying the original thereon. The original stage includes (i) a first holding portion for holding the original and having a first surface to be contacted to one surface of the original, the first holding portion being configured to position the original in a direction perpendicular to the surface, and (ii) a second holding portion for holding the original and having a second surface to be contacted to the surface, the second holding portion being elastically or resiliently deformable.
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Fujiwara Yasuhiro
Miyajima Yoshikazu
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Kim Peter B.
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