Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2007-11-13
2007-11-13
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C359S820000
Reexamination Certificate
active
11387683
ABSTRACT:
An exposure apparatus which exposes a pattern of an original onto a substrate. The apparatus includes an optical system, including a reflective optical element, configured to conduct exposure light, a cooling mechanism configured to cool the reflective optical element included in the optical system, a detection unit configured to detect cooling information of the cooling mechanism and to produce a detection result, and a determination unit configured to determine optical characteristics of the reflective optical element, based on the detection result of the detection unit and a previously stored correlation between optical characteristics of the reflective optical element and the cooling information of the cooling mechanism.
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patent: 2001-143992 (2001-05-01), None
patent: 2004-193468 (2004-07-01), None
Canon Kabushiki Kaisha
Nguyen Henry Hung
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