Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-07-03
2007-07-03
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S077000, C359S290000, C359S291000, C359S855000
Reexamination Certificate
active
11237486
ABSTRACT:
An exposure apparatus includes a beam splitter for splitting light from a light source into first and second beams, a spatial light modulator, arranged in an optical path for the first beam, for modulating a phase distribution of the first beam, a beam coupler for coupling the first beam with the second beam, a projection optical system for projecting a pattern of the spatial light modulator onto a substrate using light from the beam coupler, and a controller for supplying a modulation signal to the spatial light modulator, wherein the spatial light modulator has a one-dimensionally or two-dimensionally arranged pixels, each pixel has plural reflective elements, and the reflective elements in the same pixel displace in the same direction simultaneously.
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A. K. Wong, Attenuating Phase Shifting Mask, Resolution Enhancement Techniques in Optical Lithograph (SPIE, Bellingham 2001), pp. 139-151.
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Mathews Alan
Morgan & Finnegan , LLP
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