Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2007-03-27
2007-03-27
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S067000, C355S077000
Reexamination Certificate
active
11149532
ABSTRACT:
An exposure apparatus for projecting a pattern of an original onto a substrate using exposure light includes a projection optical system to project the pattern onto the substrate; a shielding structure, having an opening through which the exposure light passes, to shield the projection optical system from an outside environment; and an attraction system, including at least one of a panel to generate an electric field and a cryogenic panel arranged to face a path of the exposure light passing through the opening, to attract contaminants.
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