Exposure apparatus and device manufacturing method

Details Exposure apparatus and device manufacturing method Exposure apparatus and device manufacturing method

2006-10-24

2006-10-24

Gandhi, Jayprakash N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S099000, C700S121000

Reexamination Certificate

active

07127311

ABSTRACT:
An exposure apparatus having a plurality of units includes a scheduling unit which schedules a process step with respect to each lot, a combining unit which combines process steps of first and second lots, to be processed consecutively, with respect to which the scheduling unit has scheduled process steps, and a control unit which controls the plurality of units based on the process steps which are combined by the combining unit. The combining unit combines the process steps such that before completion of a process of the first lot and before loading of the second lot, a unit which is no longer used for the first lot starts a first process concerning the second lot.

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