Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-07-12
2011-07-12
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
07978305
ABSTRACT:
An exposure apparatus which exposes a pattern of an original onto a substrate via a projection optical system in a state in which a gap between the projection optical system and the substrate is filled with a liquid. A liquid supply unit supplies liquid to the gap. A front side degassing unit performs a degassing to the liquid prior to being supplied to the gap. A dissolved gas measurement unit is provided on the downstream side of the front side degassing unit, and a rear side degassing unit is provided on the downstream side of the dissolved gas measuring unit. The front side degassing unit has a dissolved oxygen control unit, which controls a supply amount of nitrogen gas so as to be the amount of dissolved oxygen, measured by the dissolved gas measurement unit, to a predetermined value.
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Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Nguyen Hung Henry
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