Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2011-03-22
2011-03-22
Mathews, Alan A (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S072000
Reexamination Certificate
active
07911582
ABSTRACT:
An exposure apparatus illuminates a pattern with an energy beam and transfers the pattern onto a substrate via a projection optical system. The exposure apparatus includes a substrate stage on which the substrate is mounted and that moves within a two-dimensional plane holding the substrate. A supply mechanism supplies liquid to a space between the projection optical system and the substrate on the substrate stage. A recovery mechanism recovers the liquid and an auxiliary recovery mechanism recovers the liquid which could not be recovered by the recovery mechanism.
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patent:
Hirukawa Shigeru
Magome Nobutaka
Tanaka Issey
Mathews Alan A
Nikon Corporation
Oliff & Berridg,e PLC
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