Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying
Reexamination Certificate
2011-04-12
2011-04-12
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Distortion introducing or rectifying
C355S030000, C355S053000, C355S055000, C355S067000, C355S072000
Reexamination Certificate
active
07924402
ABSTRACT:
An exposure apparatus exposes a substrate by projecting a pattern image onto the substrate via a projection optical system and a liquid. The exposure apparatus includes a liquid supply device which supplies liquid onto the substrate from above the substrate through a first and second supply ports disposed in a vicinity of a projection area onto which the pattern image is projected, and a liquid recovery device which recovers liquid on the substrate from above the substrate through an inside recovery port disposed outside the first and second supply ports and an outside the second recovery port disposed outside the inside recovery port.
REFERENCES:
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4480910 (1984-11-01), Takanashi et al.
patent: 5528118 (1996-06-01), Lee
patent: 5610683 (1997-03-01), Takahashi
patent: 5623853 (1997-04-01), Novak et al.
patent: 5715039 (1998-02-01), Fukuda et al.
patent: 5825043 (1998-10-01), Suwa
patent: 5874820 (1999-02-01), Lee
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6341007 (2002-01-01), Nishi et al.
patent: 6400441 (2002-06-01), Nishi et al.
patent: 6549269 (2003-04-01), Nishi et al.
patent: 6590634 (2003-07-01), Nishi et al.
patent: 2001/0019399 (2001-09-01), Hagiwara
patent: 2002/0163629 (2002-11-01), Switkes et al.
patent: 2003/0030916 (2003-02-01), Suenaga
patent: 2003/0174408 (2003-09-01), Rostalski et al.
patent: 2004/0000627 (2004-01-01), Schuster
patent: 2004/0075895 (2004-04-01), Lin
patent: 2004/0103950 (2004-06-01), Iriguchi
patent: 2004/0109237 (2004-06-01), Epple et al.
patent: 2004/0114117 (2004-06-01), Bleeker et al.
patent: 2004/0118184 (2004-06-01), Violette
patent: 2004/0119954 (2004-06-01), Kawashima et al.
patent: 2004/0125351 (2004-07-01), Krautschik
patent: 2004/0136494 (2004-07-01), Lof et al.
patent: 2004/0160582 (2004-08-01), Lof et al.
patent: 2004/0165159 (2004-08-01), Lof et al.
patent: 2004/0169834 (2004-09-01), Richter et al.
patent: 2004/0169924 (2004-09-01), Flagello et al.
patent: 2004/0180294 (2004-09-01), Baba-Ali et al.
patent: 2004/0180299 (2004-09-01), Rolland et al.
patent: 2004/0207824 (2004-10-01), Lof et al.
patent: 2004/0211920 (2004-10-01), Derkson et al.
patent: 2004/0224265 (2004-11-01), Endo et al.
patent: 2004/0224525 (2004-11-01), Endo et al.
patent: 2004/0227923 (2004-11-01), Flagello et al.
patent: 2004/0233405 (2004-11-01), Kato et al.
patent: 2004/0253547 (2004-12-01), Endo et al.
patent: 2004/0253548 (2004-12-01), Endo et al.
patent: 2004/0257544 (2004-12-01), Vogel et al.
patent: 2004/0259008 (2004-12-01), Endo et al.
patent: 2004/0259040 (2004-12-01), Endo et al.
patent: 2004/0263808 (2004-12-01), Sewell
patent: 2004/0263809 (2004-12-01), Nakano
patent: 2005/0002004 (2005-01-01), Kolesnychenko et al.
patent: 2005/0007569 (2005-01-01), Streefkerk et al.
patent: 2005/0007570 (2005-01-01), Streefkerk et al.
patent: 2005/0018155 (2005-01-01), Cox et al.
patent: 2005/0018156 (2005-01-01), Mulkens et al.
patent: 2005/0024609 (2005-02-01), De Smit et al.
patent: 2005/0030497 (2005-02-01), Nakamura
patent: 2005/0030498 (2005-02-01), Mulkens
patent: 2005/0030506 (2005-02-01), Schuster
patent: 2005/0030511 (2005-02-01), Auer-Jongepier et al.
patent: 2005/0036121 (2005-02-01), Hoogendam et al.
patent: 2005/0036183 (2005-02-01), Yeo et al.
patent: 2005/0036184 (2005-02-01), Yeo et al.
patent: 2005/0036213 (2005-02-01), Mann et al.
patent: 2005/0037269 (2005-02-01), Levinson
patent: 2005/0041225 (2005-02-01), Sengers et al.
patent: 2005/0042554 (2005-02-01), Dierichs et al.
patent: 2005/0046813 (2005-03-01), Streefkerk et al.
patent: 2005/0046934 (2005-03-01), Ho et al.
patent: 2005/0048220 (2005-03-01), Mertens et al.
patent: 2005/0048223 (2005-03-01), Pawloski et al.
patent: 2005/0052632 (2005-03-01), Miyajima
patent: 2005/0068639 (2005-03-01), Pierrat et al.
patent: 2005/0073670 (2005-04-01), Carroll
patent: 2005/0078286 (2005-04-01), Dierichs et al.
patent: 2005/0078287 (2005-04-01), Sengers et al.
patent: 2005/0084794 (2005-04-01), Meagley et al.
patent: 2005/0094116 (2005-05-01), Flagello et al.
patent: 2005/0100745 (2005-05-01), Lin et al.
patent: 2005/0110973 (2005-05-01), Streefkerk et al.
patent: 2005/0117224 (2005-06-01), Shafer et al.
patent: 2005/0122497 (2005-06-01), Lyons et al.
patent: 2005/0132914 (2005-06-01), Mulkens et al.
patent: 2005/0134815 (2005-06-01), Van Santen et al.
patent: 2005/0134817 (2005-06-01), Nakamura
patent: 2005/0141098 (2005-06-01), Schuster
patent: 2005/0145265 (2005-07-01), Ravkin et al.
patent: 2005/0145803 (2005-07-01), Hakey et al.
patent: 2005/0146694 (2005-07-01), Tokita
patent: 2005/0146695 (2005-07-01), Kawakami
patent: 2005/0147920 (2005-07-01), Lin et al.
patent: 2005/0153424 (2005-07-01), Coon
patent: 2005/0158673 (2005-07-01), Hakey et al.
patent: 2005/0164502 (2005-07-01), Deng et al.
patent: 2005/0174549 (2005-08-01), Duineveld et al.
patent: 2005/0175940 (2005-08-01), Dierichs
patent: 2005/0185269 (2005-08-01), Epple et al.
patent: 2005/0190435 (2005-09-01), Shafer et al.
patent: 2005/0190455 (2005-09-01), Rostalski et al.
patent: 2005/0205108 (2005-09-01), Chang et al.
patent: 2005/0213061 (2005-09-01), Hakey et al.
patent: 2005/0213072 (2005-09-01), Schenker et al.
patent: 2005/0217135 (2005-10-01), O'Donnell et al.
patent: 2005/0217137 (2005-10-01), Smith et al.
patent: 2005/0217703 (2005-10-01), O'Donnell
patent: 2005/0219481 (2005-10-01), Cox et al.
patent: 2005/0219482 (2005-10-01), Baselmans et al.
patent: 2005/0219488 (2005-10-01), Nei et al.
patent: 2005/0219499 (2005-10-01), Maria Zaal et al.
patent: 2005/0225737 (2005-10-01), Weissenrieder et al.
patent: 2005/0231694 (2005-10-01), Kolesnychenko et al.
patent: 2005/0233081 (2005-10-01), Tokita
patent: 2005/0237501 (2005-10-01), Furukawa et al.
patent: 2005/0243292 (2005-11-01), Baselmans et al.
patent: 2005/0245005 (2005-11-01), Benson
patent: 2005/0253090 (2005-11-01), Gau et al.
patent: 2005/0259232 (2005-11-01), Streefkerk et al.
patent: 2005/0259233 (2005-11-01), Streefkerk et al.
patent: 2005/0259234 (2005-11-01), Hirukawa et al.
patent: 2005/0264774 (2005-12-01), Mizutani et al.
patent: 2005/0264778 (2005-12-01), Lof et al.
patent: 2005/0270505 (2005-12-01), Smith
patent: 2005/0280791 (2005-12-01), Nagasaka et al.
patent: 2007/0109517 (2007-05-01), Takaiwa et al.
patent: 221 563 (1985-04-01), None
patent: 224 448 (1985-07-01), None
patent: A 57-153433 (1982-09-01), None
patent: A-58-202448 (1983-11-01), None
patent: A-59-019912 (1984-02-01), None
patent: A-62-065326 (1987-03-01), None
patent: A-63-157419 (1988-06-01), None
patent: A-04-305915 (1992-10-01), None
patent: A-04-305917 (1992-10-01), None
patent: A-05-062877 (1993-03-01), None
patent: A-06-124873 (1994-05-01), None
patent: A-07-220990 (1995-08-01), None
patent: A-08-166475 (1996-06-01), None
patent: A-08-316125 (1996-11-01), None
patent: A-08-330224 (1996-12-01), None
patent: A-10-163099 (1998-06-01), None
patent: A-10-214783 (1998-08-01), None
patent: A-10-303114 (1998-11-01), None
patent: A-10-340846 (1998-12-01), None
patent: A-11-176727 (1999-07-01), None
patent: A-2000-058436 (2000-02-01), None
patent: A-2000-505958 (2000-05-01), None
patent: A-2004-020711 (2004-01-01), None
patent: A-2004-259966 (2004-09-01), None
patent: A-2004-349645 (2004-12-01), None
patent: WO 99/49504 (1999-09-01), None
patent: WO 02/091078 (2002-11-01), None
patent: WO 03/077037 (2003-09-01), None
patent: WO 2004/095135 (2003-11-01), None
patent: WO 2004/019128 (2004-03-01), None
patent: WO 2004/053956 (2004-06-01), None
patent: WO 2004053953 (2004-06-01), None
patent: WO 2004053955 (2004-06-01), None
patent: WO 2004/055803 (2004-07-01), None
patent: WO 2004/057589 (2004-07-01), None
patent: WO 2004/057590 (2004-07-01), None
patent: WO 2004/077154 (2004-09-01), None
patent: WO 2004/081666 (2004-09-01), None
patent: WO 2004/090577 (2004-10-01), None
patent: WO 2004/090633 (2004-10-01), None
patent: WO 2004/090634 (2004-10-01), None
patent: WO 2004/092830 (2004-10-01), None
patent: WO 2004/092833 (2004-10-01), None
patent: WO 2004/093130 (2004-10-01), None
patent: WO 2004/093159 (2004-10-01), None
patent: WO 2004/093160 (
Hirakawa Osamu
Nagasaka Hiroyuki
Yamamoto Taro
Kim Peter B
Nikon Corporation
Oliff & Berridg,e PLC
Riddle Christina
Tokyo Electron Limited
LandOfFree
Exposure apparatus and device manufacturing method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Exposure apparatus and device manufacturing method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exposure apparatus and device manufacturing method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2655102