Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2008-01-15
2008-01-15
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S075000
Reexamination Certificate
active
10871210
ABSTRACT:
In order to improve a responsiveness of the radiation cooling and to switch a cooling position, an exposure apparatus for exposing an object includes a cooling mechanism for radiation-cooling the object, and a regulator for regulating a radiant heat transfer amount between said cooling mechanism and the object.
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Morgan & Finnegan , LLP
Nguyen Henry Hung
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