Exposure apparatus and device fabrication method

Details Exposure apparatus and device fabrication method Exposure apparatus and device fabrication method

2007-08-07

2007-08-07

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C378S034000, C359S872000

Reexamination Certificate

active

11407251

ABSTRACT:
An exposure apparatus includes a reflective element for reflecting and introducing light from a light source to a plate, at least one first driver for providing the reflective element with a force and/or a displacement in at least one directions, and at least one second driver for providing the reflective element with a force and/or a displacement in at least one directions, wherein the first and second drives are connected in series to each other.

REFERENCES:
patent: 5448612 (1995-09-01), Kasumi et al.
patent: 5835560 (1998-11-01), Amemiya et al.
patent: 6014421 (2000-01-01), Chiba et al.
patent: 6757051 (2004-06-01), Takahashi et al.
patent: 7061580 (2006-06-01), Miyajima
patent: 2001/0006762 (2001-07-01), Kwan et al.
patent: 2002/0185983 (2002-12-01), Poon et al.
patent: 2003/0043354 (2003-03-01), Butler
patent: 5-129188 (1993-05-01), None
patent: 6-267827 (1994-09-01), None

Affiliated with

Also associated with

Rating

Exposure apparatus and device fabrication method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Exposure apparatus and device fabrication method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exposure apparatus and device fabrication method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3887742