Exposure apparatus and device fabrication method

Details Exposure apparatus and device fabrication method Exposure apparatus and device fabrication method

2007-06-26

2007-06-26

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C359S819000

Reexamination Certificate

active

10827851

ABSTRACT:
A support apparatus includes an optical element, a first support member that supports the optical element, and a second support member that contacts the optical element or the first support member and positions the optical element, wherein the optical element is removably attached to the second support member, or the optical element and the first support member are removably attached to the second support member.

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