Exposure apparatus and device fabrication method

Details Exposure apparatus and device fabrication method Exposure apparatus and device fabrication method

2006-06-13

2006-06-13

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C378S034000

Reexamination Certificate

active

07061580

ABSTRACT:
An exposure apparatus includes a reflective element for reflecting and introducing light from a light source to a plate, at least one first driver for providing the reflective element with a force and/or a displacement in at least one directions, and at least one second driver for providing the reflective element with a force and/or a displacement in at least one directions, wherein the first and second drives are connected in series to each other.

REFERENCES:
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patent: 5835560 (1998-11-01), Amemiya et al.
patent: 6014421 (2000-01-01), Chiba et al.
patent: 6757051 (2004-06-01), Takahashi et al.
patent: 2003/0043354 (2003-03-01), Butler
patent: 5-129188 (1993-05-01), None
patent: 6-267827 (1994-09-01), None

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